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State Key Laboratory of Transducer Technology (North base)
Update time: 2009-10-27
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Established in 1987, the State Key Laboratory of Transducer Technology is the first State Key Laboratory in the research field of sensors and transducers in China. After more than two decades, the laboratory has become one of the most outstanding micro/nano research centers in China.

The laboratory focuses on extensive and various research themes based on MEMS/NEMS technology, and has made many distinguished accomplishments in the fields such as microsensors and microsystems based on MEMS technology, theory and techniques of integrated microsystems, biochemical sensors and analysis systems, physical sensors and systems, micro transducers and systems. Lots of research production and patents have been achieved.

The laboratory has 3500 m2 lab area, with 500 m2 clean room. The clean room is equipped with state-of-the-art MEMS tools including deposition, photolithography, etching, and testing systems, which have the capability to fabricate many kinds of microstructures for MEMS devices. The laboratory has the preponderance of the intercross of many subjects such as electronics, information technology, biology technology, material sciences, chemistry and so on.

The laboratory consists of more than 40 faculty members, including 6 professors and7 associate professors, and about 80 graduate students. The laboratory has many international cooperation projects, including Sino-UK (Chinese Academy of Sciences-Royal Society) joint project, the 7th EFs (European Frames) and so on. The laboratory has established high reputation at home and abroad.


Recent Major Research Areas

(1)  Micro-Electro-Mechanical System (MEMS) processing and packaging technology

(2)  Lab-on-chip (LOC) and Micro Total Analysis System (μTAS)

(3)  Integrated biological micro sensor System-on-Chip (SOC)

(4)  Multi-parameter blood testing micro system

(5)  Surface Plasma Resonance (SPR) biochemical analysis system

(6)  Gas sensors for hazardous chemicals detection

(7)  Micro sensorsfor chemical and biological pollution monitoring

(8)  Portable Ion Mobility Spectrometer (IMS)

(9)  Electric field sensors

(10) Highprecision pressure sensors

(11) Silicon micromachined accelerometers and gyroscopes

(12) Monolithic integrated temperature, humidity and pressure meteorological sensors

(13) Novel integrated optical sensors

(14) Wireless sensor networks


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